ESC (Electro Static Chuck)- LAM /Novellus , AMAT , TEL
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ESC (Electro Static Chuck)- LAM /Novellus , AMAT , TEL
Www.metron-pm.com ESC & Heater Refurbishment and Manufacture Repairing and refurbishing ESC & Heater polyamide, AI, Ceramic, Anodize ESC- Problem Solving The purpose of ESC refurbishment is to solve the following common problems: Wafer-sticking Helium Leak Leak Current High Arcing Voltage unstable WAT NG CD abnormal CD Yeild Lost ESC & Pedestal ...
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