Abstract: A low-temperature annealing process for 4H-SiC/SiO2 stack in O2 ambient was found to annihilate the positive fixed charges induced by the interface nitridation process effectively, while ...
Abstract: Subwavelength grating (SWG) couplers have attracted great attention in silicon photonics due to the flexible capacity of index tailoring for light coupling. With the intrinsic high ...
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